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SPECS EBE-1 User Manual
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All rights reserved. No part of this manual may be reproduced
without the prior permission of SPECS GmbH.
User manual for the Electron Beam Evaporator
EBE-1
.
Version
1.11
dated at
18 March 2008
.
SPECS order number for this manual:
78 000 155
EBE-1
SPECS GmbH - Surface Analysis
and Computer Technology
Voltastrasse 5
13355 Berlin
GERMANY
PHONE:+49 (0)30 46 78 24 -0
FAX: +49(0)30 4 64 20 83
http://www.specs.de
support@specs.de
1
3
Table of Contents
Section 1
3
Default Chapter
3
Table of Contents
3
1 Introduction
5
Overview
5
Rods and Crucibles
5
Safety Instructions
6
2 Inspection
7
3 Installation
9
Connections
9
Linear Motion Thimble
10
Mounting Rods and Crucibles
10
Conditioning the Filament
11
HV Conditioning
12
Setting up Rod Position
12
4 Operation
13
Operating the EBE-1 Shutter
13
Evaporation from Rod
13
Starting Evaporation
14
Continuing Evaporation
16
Ending Evaporation
16
Evaporation from Crucibles
16
Crucible Lids
16
Operation with the Flux Controller
17
Figure 1: Front Panel Flux Controller
17
Setting up Manual Control of the PID Controller
18
Setting the Maximum and Minimum Output
19
Setting up Auto Control
20
PID and Controller Parameters
21
Safe Operation Tips
21
5 Maintenance
23
Replacing the Filament
23
Making a New Filament
24
Figure 2: Filament Dimensions
24
6 Specifications and Options
25
Physical
25
Beam
25
Table 1: Physical Specifications
25
Table 2: Beam Specifications
25
Power Supply
26
Options
26
Table 3: Power Supply Specifications
26
Table 4: Options
26
7 Drawings
27
Figure 3: Evaporator Overview and Dimensions
27
Figure 4: Evaporator Details
28
Section 2
29
4
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SPECS EBE-1 Specifications
General
Brand
SPECS
Model
EBE-1
Category
Vaporizers
Language
English
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