Chapter
6 Specifications and Options
6.1 Physical
Mounting flange: 2.75 " (NW 35 CF)
In vacuum length: 200 mm (7.5 ")
In vacuum diameter: 34 mm (1.34 ") max
Bakeout temperature: 200
o
C
Rod feed: 50 mm (2 ") as standard
Rod diameters: 2,3,4,5 or 6 mm (2 mm supplied as standard. Also ac-
cepts crucibles.)
Crucible volume: 0.25 cc
Crucible materials: Mo, Ta, W, pyrolytic graphite (PG), vitreous carbon (VC)
Table 1: Physical specifications
6.2 Beam
Deposition Rate: Measured at 100 mm: Refractory materials e.g. W, Ta:
~2nm/min.
Higher vapour pressure materials e.g. Ag, Cu: up to nm/second.
Deposition rates controllable down to <0.01 A/s = 0.2 monolay-
er/min.
Beam Divergence: ~10
o
with flux electrode fitted
Table 2: Beam specifications
EBE-1 21
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