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SPECS EBE-1 User Manual

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Health and Safety Declaration for used Vacuum
Equipment and Components
The repair and/or service of vacuum equipment/components can only be carried out if a correctly
completed declaration has been submitted for every component.
1.______________________________________________Description of components
Type: __________________________________________Serial No:_____________________
2. Reasons for return____________________________________________________________
3. Equipment condition
Has the equipment ever come into contact with the following (e.g. gases, liquids, evaporation
products, sputtering products ...)
Yes No
toxic substances?
corrosive substances?
microbiological substances (incl. sample material)?
radioactive substances (incl. sample material)?
ionising particles/radiation (α, β, γ, neutrons, ...)?
Yes No
Is the equipment free from potentially harmful and hazardous
substances?
4. Decontamination Procedure
Please list all harmful substances, gases and by-products which have come into contact with the vacu-
um equipment/component during the decontamination methode used.
SUBSTANCE DECONTAMINATION METHODE
5. Legally Binding Declaration
Organisation:
Address:
Phone/Fax:
Name/Position:
I hereby declare that the information supplied on this form is complete and accurate.
Date:__________Signature:_____________Company stamp
Rev.: 0 1/1

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SPECS EBE-1 Specifications

General IconGeneral
BrandSPECS
ModelEBE-1
CategoryVaporizers
LanguageEnglish