1-8
avoid accidents is to develop safe working habits while taking every reasonable
precaution.
• Thoroughly review and understand your process. In some applications it
may be necessary to install a fume hood, wear protective glasses and
clothing, and possibly be within easy reach of a safety shower, eyewash
station, and fire extinguisher.
• DANGER! Never operate the furnace with the enclosures removed.
Lethal voltages are present when the machine is in operation.
•
WARNING! Never operate the furnace without adequate ventilation or
with an improperly installed exhaust line. Please refer to Section 2.2.3.
• DANGER! Do not allow inexperienced technicians to work on the
furnace. The main switch on the rear electrical enclosure has to be in the
“OFF” position to disconnect all power. The disconnect switch should be
locked and tagged “OFF” when working on the machine with the main
enclosure, lid cover, electrode access plate, or aluminum filler plates
surrounding the chamber removed.
• DANGER! Do not modify or adjust the chamber pressure-relief valve to a
pressure setting higher than 50 psig (3.52 kg/cm
2
). Pressures in excess of
the design rating of the pressure vessel and latching mechanism may cause
an explosion that could cause serious injury or death.
• WARNING! Do not attempt to disassemble parts of the gas distribution
system without shutting off or disconnecting the gas supply.
• WARNING! The furnace must be located in a sufficiently large room
with adequate ventilation to avoid the possibility of asphyxiation from
leaking process gas.
• WARNING! If the process produces toxic gases, or uses an active
atmosphere containing formic acid, the chamber must be adequately
purged and evacuated before opening the lid.
• WARNING! Tooling, product, sight glass, and radiation shield can
get hot enough to cause severe burns. Always wear protective heat-
resistant gloves or allow the furnace and tooling to sufficiently cool
before removing the boat assembly from the process chamber.
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