1-4
1.3 Specifications
1.3.1 Physical Specifications
Width: 34.0 in. (86.4 cm)
Depth: 28.0 in. (71.1 cm)
Height: 20.3 in. (51.6 cm)
Weight: 180 lb. (80 kg)
1.3.2 Electrical Specifications
Input Voltage: 110-120V, 208-240 V, 60-50 Hz, Single-Phase
Input Power: Peak
Average
2.8 kW .80 kW
1.3.3 Process Area Dimensions
Heated Area: 5.0 x 4.0 in. (12.5 x 10.0 cm)
Recommended Maximum Working Area: 3.5 x 3.5 in. (8.9 x 8.9 cm)
Clearance Between Target Plate and View Port: 4.0 in. (10.2 cm)
Clearance Between Target Plate and Lid Outside of Process Area: .80 in (2.0 cm)
View Port: 3.5 in. (8.9 cm) Diameter, Polished Both Sides
1.3.4 Thermal Performance
Note: The following thermal performance specifications are typical for a standard
.25 in. (.64 cm) thick, blank target plate. Actual performance will vary depending
on tool design and product configuration.
Maximum Heating Rate in Vacuum: 4.0 °C/sec.
Thermal Uniformity Across Work Area: 5 °C.
Typical Forced Cooling Rate: 2 °C/sec.
Maximum Operating Temperature: 450 °C.
Maximum Continuous Operating Temperature: 450 °C.
1.3.5 Control System
Self-contained intelligent ramping controller linked with programmable logic
controller, (PLC), and custom software.
Features:
• Simple time-based programming scheme based on one-second increments.
• Maximum program time: 100 hours.
• Built in facility to store up to 40 programs.
• Program length of up to 256 steps total.
• Built-in program editor.
• Multiple temperature ramp and hold segments.
• Multiple gas / vacuum valve actuation.
• Multiple PID settings.
To Next Page
Loading...