1-5
• Intelligent vacuum / vent cycle to assist lid operations.
• Solid state relay / burst-fire heater control.
• CE certified control components.
• Dual universal analog inputs (used with MT-2 options).
1.3.6 Chamber Operating Parameters
Maximum Operating Pressure: 50 psig (4.5 bar).
Rated Vacuum Level: 100 millitorr or less.
Maximum Allowable Case Temperature Excluding Sight Glass: 110 °F (43 °C).
1.3.7 Facilities Requirements
Process Gas:
• Two separate programmable inputs.
• Minimum recommended supply line: ¼ in., (.64 cm) inside diameter.
• Maximum recommended dew point: -100 °F, (-73 °C).
• Minimum operating pressure: 75 psig, (5.3 kg/cm
2
).
• Maximum operating pressure: 90 psig, (6.3 kg/cm
2
).
• Acceptable process gases at either port: air, (@ temperatures ≤200 °C),
nitrogen, argon, helium, forming gas with 5% hydrogen maximum; consult
factory for gases not listed.
• N
2
/formic acid introduced at GAS 2 port only, (optional):
Recommended operating pressure: 15 psig maximum, (1.06 kg/cm
2
).
Recommended flowrate: 10-20 scfh, (4.7-9.4 liter/min.) to atmosphere.
Cooling Water:
• 1.0 gpm, (3.8 lpm), @ 30.0 psig, (2.11 kg/cm
2
) minimum recommended.
• Coolant temperature: 68-77 °F (20-25 °C).
• Drain Requirement: Gravity drain, or 30 psig, (2.11 kg/cm
2
), minimum
differential pressure from inlet to outlet with 60 psig, (4.22 kg/cm
2
)
maximum at inlet port.
Exhaust:
• Chamber exhaust: 6.3 ft
3
/min, (178.4 l
3
/min), average when exhausting
chamber from full pressure.
• Vacuum pump exhaust: .20 ft
3
/min, (5.6 l
3
/min), average when evacuating
chamber from atmospheric pressure with recommended pump.
• Process exhaust, fume hood: No established requirement, completely process
related.
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