1-6
CAUTION! If the machine will be used with the N
2
/formic acid option,
all national, local, and in-house regulations concerning the proper exhaust
and ventilation of acid vapor must be observed.
CAUTION! The exhaust line must not be valved off or blocked at any
time to prevent the build-up of gas pressure in the system.
1.3.8 Optional Equipment Specifications
Vacuum Pumps:
• The VP-5 Option provides a two-stage, oil-sealed, rotary vane pump with an
integral single phase motor, exhaust filter, and separate foreline trap. An
included installation kit provides the necessary fittings, power cord and
vacuum hoses to complete the installation.
Weight: 41 lbs. (18.6 kg).
Size: (L x W x H) 20.0 x 12.0 x 10.5 in. (50.8 x 30.5 x 26.7 cm).
Additional Power Requirement: 30 kW @ 115/200-230 V 60 Hz single
phase.
30 kW @ 110/200-220 V 50 Hz single
phase.
Nominal Pumping Speed: @ 60 Hz, 3.0 cfm; @ 50 Hz, 2.5 cfm.
Ultimate Total Pressure: < 4 x 10
-3
Torr.
• The DP-5 Option provides a dry, multiple-stage, roots type vacuum pump
with an integral single phase motor, exhaust silencer, and vibration isolation
pads. This system completely eliminates the possibility of hydrocarbons
migrating into the process chamber from the vacuum pump. An included
installation kit provides the necessary fittings, power cord, and hose to
complete the installation.
Weight: 51 lbs. (23 kg)
Size: (L x W x H) 19.7 x 7.5 x 10.6 in. (49.9 x 19.0 x 27.0 cm)
Additional Power Requirement: 750VA @ 110/230 V 60/50 Hz single phase
Nominal Pumping Speed: 8.2 cfm
Ultimate Total Pressure: < 38 x 10
-3
Torr
Instrumentation:
• The DVG-1 Option adds a panel mounted digital vacuum level display
together with a Pirani type vacuum transducer that is plumbed to the furnace
chamber. The system is calibrated for nitrogen gas and will automatically
display vacuum level in either torr or millitorr units, from 999 torr to 1
millitorr. Note: Required option on 220-240 volt models.
• The MT-2 Option adds two thermocouples to the process chamber for
research and process development work. Type K, .040” diameter x 18” long
sheathed thermocouples are provided for durability and vacuum integrity.
To Next Page
Loading...