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regardless of tool orientation. Insert the control thermocouple in the right-hand
hole until it bottoms out. Occasionally it will be necessary to bend the
thermocouple slightly so that it pushes toward the hole. Do not omit this
important step.
Note: If the machine is equipped with the MT-2 option there will be three
thermocouples inside the chamber at all times. If either of the MT-2
thermocouples were to be accidentally inserted into the target plate the
temperature control system would not function and the machine could be
potentially damaged from excessive heating. This option includes a small
ceramic bead installed on the control thermocouple to distinguish it from either
of the MT-2 thermocouples. When replacing the control thermocouple, be sure
to replace the bead and bend the thermocouple to keep it in place. Three
additional beads were shipped with the MT-2 option; if additional beads are
required they can be ordered directly from SST, (P/N 35378).
Close the Lid
• Lower the lid and move the handle to the DOWN position.
• Press the Lid Cycle Switch. A timed Exhaust/Purge Cycle will be
followed by a timed Vacuum Cycle. The chamber locks will
automatically engage when sufficient vacuum is obtained.
3.3.7 Profile Selection and Execution
A profile has to be selected before it can be executed unless a default profile was
previously designated. Select a stored profile:
• From the Setup Page move the cursor to Go to Setup and then press the
Right Key (>).
• From Choose to Setup, select Digital Input 1. Press the Right Key (>).
• From Choose to Name, select NO. Press the Right Key (>).
• From Choose Function, select Start Profile. Press the Right Key (>).
• Move the cursor to the desired profile. Press the Right Key (>).
• From Start Step, select Step 1. Press the Right Key (>).
• From Choose Condition, select LOW. Press the Right Key (>).
• To Exit, press the Left Key (<).
• From Save Setup Changes or Restore Value, Press the Save Key (<).
The compound gage on the Upper Control Panel will begin to move as vacuum is
developed in the process chamber.
When process gas is called for, the appropriate pressure gage will momentarily
drop and the corresponding flowmeter ball will rise as the valve opens. When
pressure is called for, the compound gage will rise as the valve opens. At
specific points in the program, thermal ramps or soaks will be apparent from the
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