Strasbaugh 6DS-SP - Page 109

Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 1
3
Operator Functions
• OVERVIEW
• INTRODUCTION TO THE 6DS-SP
VERSION 4.25 SOFTWARE
• MENUS USED IN BASIC OPERATION
• BASIC OPERATION
• OPERATION USING MANUAL
LOADING OF WAFERS
• OPERATOR ROUTINE
PREVENTIVE MAINTENANCE
AND ASSOCIATED PROCEDURES
• CYCLE HALTING FUNCTIONS AND
ASSOCIATED PROCEDURES
• CLEANING STATION PAD PRESSURE
ADJUSTMENTS