Operations Model 6DS-SP Planarizer
3 - 2 Version 4.0 - February 1998
OVERVIEW 3
Messages Displayed on the Control Computer Screen Take Precedence! 3
Assumptions 3
INTRODUCTION TO THE 6DS-SP SOFTWARE 4
Software Features 5
Menu Grouping and Recipe Definition 8
Menu Grouping 8
Recipe Definition 10
Calibration/Configuration Changes 11
User Interface Description 12
Screen Usage 13
Keypad and Keyboard Usage 16
User Input 18
Light Tower Support 20
Menu Selection 22
MENUS USED IN BASIC OPERATION 24
HOME MACHINE MENU 25
Function Key Choices Available at the Home Machine Menu 27
AUTO POLISH CYCLE MENU 28
Function Key Choices Available at the Auto Polish Cycle Menu 29
Additional Features 30
SLURRY FLUSH MENU 34
Menu Item Descriptions at the Slurry Flush Menu 35
Additional Feature 35
RECIPE MANAGEMENT MENU 36
Function Key Choices Available at the Recipe Management Menu 38
BASIC OPERATION 39
Summary 39
Problems and Error Messages 39
1 - Power Up 40
2 - Perform Home Sequence Routine 41
3 - Place Carriers on Spindles 44
4 - Retrieve a Stored Recipe 47
5 - Run an Auto Polish Cycle 48
OPERATION USING MANUAL LOADING OF WAFERS 51
Summary 51
1 - Power Up 52
2 - Perform Home Sequence Routine 52
3 - Place Carriers on Spindles 52
4 - Retrieve a Stored Recipe 52
5 - Run an Auto Polish Cycle Using the “Start with Load” Feature 53
To Next Page
Loading...
