Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 3
OPERATOR ROUTINE PREVENTIVE MAINTENANCE AND ASSOCIATED
PROCEDURES 55
Daily Preventive Maintenance Schedule 56
Slurry System Flush 57
Removal of Carriers from Spindles 61
Consumable Materials Servicing 63
Polishing Pad Removal and Installation 63
Wafer Backing Insert Change 65
Wafer Template Ring Change 67
Operation of a Table Conditioning Cycle Using the Conditioning Arm 69
Operation of a Table Conditioning Cycle with Conditioning Devices on
the Spindles 72
Operation of a Carrier Cleaning Cycle 75
Operation of a Spindle Flush Cycle 75
Heater/Chiller Operation 76
Heater/Chiller Control Unit and Temperature Display 76
Water Temperature Display on the 6DS-SP Status 76
CYCLE HALTING FUNCTIONS AND ASSOCIATED PROCEDURES 77
Cycle Halt Button 78
During Polishing Phase of Auto Polish Cycle 78
During Robot Wafer Movement Phase of Auto Polish Cycle 78
“Finish” an Auto Polish Cycle 79
“Abort” an Auto Polish Cycle or Other Machine Motion 80
Open Door 81
Emerg Off Button 82
Procedure for Safe Removal of Wafer from Robot 83
CARRIER LOADING AND UNLOADING FOR MACHINES EQUIPPED
WITH A SECOND POLISH TABLE 85
Carrier Loading for the Two-Table Machine 85
Carrier Unloading for the Two-Table Machine 88
CLEANING STATION PAD PRESSURE ADJUSTMENTS 91
Cylinder Pressure / Pad Force Table 92
Procedure for Setting Pressure 93
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