Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 91
CLEANING STATION PAD PRESSURE
ADJUSTMENTS
Notes:
• This procedure provides process settings useful in obtaining optimal
cleaning results.
• Although repeated in the Cleaning Stations section of Chapter 11,
Pneumatic Adjustments, of the 6DS-SP Maintenance manual as #4 in the
Cleaning Station Adjustment Series, the cleaning station pad pressure
adjustments detailed below are appropriate process procedures.
(Refer to the Cleaning Stations section of Chapter 11, Pneumatic
Adjustments, found in the 6DS-SP Maintenance manual, for a listing of
the adjustment series.)
Related Engineering Drawing
• 220734A1
Solenoid Valve Sub-Panel Assembly
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