Strasbaugh 6DS-SP - Page 114

Operations Model 6DS-SP Planarizer
3 - 6 Version 4.0 - February 1998
SOFTWARE FEATURES
The table below lists software features, the menu(s) at which it is found, and
where in the 6DS-SP Operations and Maintenance manuals to find detailed
information on the feature.
Feature Menu(s)
Where to Find Details -
Manual Location(s)
PASSWORD
PROTECTION
Password Menu Operations:
• Ch. 4-Machine Setup
OPTIONAL OPERATOR
ACCESS TO POLISH TIME
AND BACKPRESSURE
POLISH PARAMETERS
Calibration/Configuration
Menu
Maintenance:
• Ch. 10-Software Calibration
• Appendix A-Calibration
Variables
PRESETTABLE WAFER
POLISH COUNT
Auto Polish Menu
Auto Polish Parameters
Menu
Operations:
• Ch. 3-Operator Functions
• Ch. 4-Machine Setup
ODD WAFER POLISHING Machine Parameters Menu
Auto Polish Menu
Operations:
• Ch. 3-Operator Functions
• Ch. 4-Machine Setup
DUAL BACKPRESSURE
CONTROL
Auto Polish Parameters
Menu
Operations:
• Ch. 4-Machine Setup
DUAL TIME AND DUAL
BACKPRESSURE ENTRY
CHOICES
Machine Parameters Menu
Auto Polish Menu
Auto Polish Parameters
Menu
Operations:
• Ch. 3-Operator Functions
• Ch. 4-Machine Setup
ALARM (ERROR) LOG Alarm Log Menu Operations:
• Ch. 5-Troubleshooting
Maintenance:
• Ch. 13-Troubleshooting
IN-SITU CONDITIONING
DUTY CYCLE
Conditioning/Cleaning
Parameters Menu
Operations:
• Ch. 4-Machine Setup