Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 33
AUTO CYCLE FEATURES:
Three Auto Cycle features are function key choices to the Auto Polish Menu.
These features are controlled by the function keys Next Step, Start
W/Load, and Start W/Unload in the Auto Polish Menu.
Next Step immediately causes the end of the present polishing step and an
advance to the next step. Polishing ends if there are no more steps for the
table used. (Steps with non-zero polish times are ignored.)
Start W/Load is applicable only if the auto mode is used. If selected,
wafers are manually placed in the load stations before pressing the START
button. When the START button is pressed, the wafers will be loaded onto
the spindles and the cycle will continue with polishing and fully automatic
operation thereafter.
Start W/Unload is applicable only if the auto mode is used. If selected,
wafers are manually placed in the unload stations before pressing the
START button. When the START button is pressed, the wafers will be
rinsed and stored in the receive cassette(s) and continue with fully automatic
operation thereafter.
Start W/Load and Start W/Unload are useful for error recovery if wafers
become lost in the machine or stuck to the table. If the operator can
manually get the wafers to the load stations, the automatic cycle can be
continued.
Flush Spndls will cause a spindle flush sequence for both spindles. This
sequence, approximately one minute long, is much longer than that used
automatically after each polishing cycle. Avoid aborting the spindle flush
sequence. Instead, always let the sequence finish to prevent leaving a
quantity of water in the backpressure system.
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