R. Howard Strasbaugh, Inc.
July 14, 1995 6DS-SP Ver 4.14 Page 1
6DS-SP VERSION 4.14
NEW FEATURES / INSTALLATION
Description:
Software version 4.14 (July 14, 1995) adds two features:
Settable spindle flush water and air blow off times.
Two table machine wafer cleaning and/or carrier pad cleaning.
NOTE: This document assumes you already have version 4.13 installed.
YOU MUST FIRST INSTALL 4.10 if your machine presently has any version prior
to 4.10.
Also, if you have any version other than 4.13 installed, you are not up to date on
changes and features from a previous version(s). Refer to documentation for any
versions that were skipped to familiarize yourself with their new features.
NOTE: New calibration variables (176 and 177) have been added in this version
that must be set before operating the machine to ensure proper spindle flushing.
Refer to the "Software Installation" section.
NOTE: New calibration variables have been added in Ver 4.12 that should be set
before operating the machine to prevent possible damage to the bridge. Refer to the
Version 4.12 software release document
A detailed description of software installation is on the last two pages.
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