R. Howard Strasbaugh, Inc.
July 14, 1995 6DS-SP Ver 4.14 Page 5
Use the nominal values shown (which will produce the same timing as the
original "hard coded" values) or choose other values. If the values are set to "0",
no spindle flushing will occur.
176 "Flush water time (secs)" 1 second nominal
177 "Flush air blowout time (secs)" 12 seconds nominal
8) If the 6DS-SP has two tables, check the settings of the following choices in the
Conditioning/Cleaning menu page 2 for every stored recipe and set as desired.
(They will probably indicate "disable" and "0 secs".) Do this by retrieving each
recipe, check its settings, and resave the recipe using the same name if you make
any changes.)
Post Polish Wafer Cleaning Enable/Disable
Wafer Cleaning Time 0 secs
Carrier Cleaning (Auto only) Enable/Disable
Carrier Cleaning Time 0 secs
NOTE: When done saving or installing software, remove the floppy disk from the
computer disk drive. Always keep floppy disks in a cool dry place.
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