R. Howard Strasbaugh, Inc.
June 28, 1995 6DS-SP Ver 4.13 Page 1
6DS-SP VERSION 4.13
NEW FEATURES / INSTALLATION
Description:
Software version 4.13 (June 28, 1995) makes two minor corrections:
For single table machines, makes sure some flags related to carrier cleaning and
wafer cleaning are cleared after an abort to ensure spindles will stop rotating when
rotation is no longer needed.
Corrects a "remaining step time" calculation error that could occur if all of the
following exist:
1) Both spindles are used
2) Separate left and right times are used (not the "matched" mode)
3) Polish time is changed "on the fly" for the current polish step
4) The polish time is changed from a time longer than the other spindle to a
time shorter than the other spindle.
NOTE: This document assumes you already have version 4.12 installed.
YOU MUST FIRST INSTALL 4.10 if your machine presently has any version prior
to 4.10.
Also, if you have any version other that 4.12 installed, you are not up to date on
changes and features from a previous version(s). Refer to documentation for any
versions that were skipped to familiarize yourself with their new features.
NOTE: New variables have been added in Ver 4.12 that should be set before
operating the machine to prevent possible damage to the bridge.
A detailed description of software installation is on the last page.
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