Operations Model 6DS-SP Planarizer
xiv Version 4.0 - February 1998
Feature Menu(s)
Where to Find Details -
Manual Location(s)
Programmable Pad
Conditioning Arm
Calibration and Setup
Calibration/Configuration
Menu
Sweep Parameters Menu
Manual Control Menu
Operations:
v Ch. 4-Machine Setup
Maintenance:
v Ch. 9-Mechanical
Maintenance:
v Ch. 10-Software Calibration
v Appendix A-Calibration
Variables
Polish and Condition Force
Units and Diameter Entry
Change
Machine Parameters Menu
Conditioning/Cleaning
Parameters Menu
Operations:
v Ch. 4-Machine Setup
Menu "Hopping " Available at All Menus Operations:
v Ch. 3-Operator Functions
(topic: Menu Selection)
"On the Fly Changes" Auto Polish Menu
Process Parameters Menus
Operations:
v Ch. 3-Operator Functions
v Ch. 4-Machine Setup
Auto Cycle Features Auto Polish Menu Operations:
v Ch. 3-Operator Functions
Manual Control Menu Manual Control Menu Maintenance:
v Ch. 9-Mechanical
v Ch. 10-Software Calibration
Servo Calibration Manual Control Menu
Calibration/Configuration
Menu
Diagnostics Menu
Maintenance:
v Ch. 9-Mechanical
v Ch. 10-Software Calibration
Lever Type Conditioning
Arm Support
Calibration/Configuration
Menu
Maintenance:
v Ch. 10-Software Calibration
v Appendix A-Calibration
Variables
Single Sweep Style Choice Conditioning/Cleaning Menu Operations:
v Ch. 4-Machine Setup
Wet Idle Slurry Flush Machine Parameters Menu
Slurry Flush Menu
Operations:
v Ch. 3-Operator Functions
v Ch. 4-Machine Setup
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