Strasbaugh Table of Contents
Version 4.0 - February 1998 xiii
New Features Information
Locator
The Version 4.25 software introduces new features not available in previous
software versions. The table below lists each feature, the menu(s) at which
it is found, and where in the 6DS-SP Operations and Maintenance manuals
to find detailed information on the feature.
Feature Menu(s)
Where to Find Details -
Manual Location(s)
Password Protection Password Menu Operations:
v Ch. 4-Machine Setup
Optional Operator Access to
Polish Time and
Backpressure Polish
Parameters
Calibration/Configuration
Menu
Maintenance:
v Ch. 10-Software Calibration
v Appendix A-Calibration
Variables
Presettable Wafer Polish
Count
Auto Polish Menu
Auto Polish Parameters
Menu
Operations:
v Ch. 3-Operator Functions
v Ch. 4-Machine Setup
Odd Wafer Polishing Machine Parameters Menu
Auto Polish Menu
Operations:
v Ch. 3-Operator Functions
v Ch. 4-Machine Setup
Dual Backpressure Control Auto Polish Parameters
Menu
Operations:
v Ch. 4-Machine Setup
Dual Time and Dual
Backpressure Entry Choices
Machine Parameters Menu
Auto Polish Menu
Auto Polish Parameters
Menu
Operations:
v Ch. 3-Operator Functions
v Ch. 4-Machine Setup
Alarm (Error) Log Alarm Log Menu Operations:
v Ch. 5-Troubleshooting
Maintenance:
v Ch. 13-Troubleshooting
In-Situ Conditioning Duty
Cycle
Conditioning/Cleaning
Parameters Menu
Operations:
v Ch. 4-Machine Setup