Operations Model 6DS-SP Planarizer
3 - 54 Version 4.0 - February 1998
Place wafer(s) on load chuck(s):
5. Open Left Side Operator Door.
6. Place wafer(s) on the load chucks (polish side down or
per supervisor instructions).
Note: Place wafers on the load chucks corresponding to the
active carriers selected for use (left, right, both), per
supervisor instructions.
Wet pad and carrier inserts:
7. Using the interior operator hand water sprayer:
a. Wet the table pad evenly.
b. Wet the carrier inserts carefully by
spraying up inside the carrier.
DO NOT direct spray up inside machine cabinet.
8. Close all doors to the machine.
9. Start the cycle:
Operator Action Explanation/Screen Display
• <START> Press the black <START> button,
located on the control panel.
The machine will execute the normal sequence as if wafers had
been placed automatically on the load stations, performing the
programmed polish cycle, and unloading the wafers onto the
load chuck(s).
10. Wait for the cycle to finish.
When the cycle is complete, the wafers will be in the receive
cassettes.
11. Open the Elevator Access Operator Door.
12. Raise the cassette sensor arms and remove the cassettes from
both the send and receive elevator sides.
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