Strasbaugh 6DS-SP - Page 164

Operations Model 6DS-SP Planarizer
3 - 56 Version 4.0 - February 1998
DAILY PREVENTIVE MAINTENANCE SCHEDULE
Note: For 7-Day, 28-Day, and 180-Day maintenance schedules, refer to the
Preventive Maintenance chapter of the 6DS-SP Maintenance manual
SUBJECT ACTION
• Slurry Lines
• Polish Pad
•
• Wafer Backing Insert
• Wafer Template Ring
• Machine Cabinet and Surfaces
• Carrier/Wafer Cleaning Stations
• Polish Table and Splash Ring
• Elevator Tanks
• Robot Vacuum Chuck
• Dial Pressure Gauge Readings
* Operate Slurry Flush Cycle once each
shift.
Inspect and change each shift.
Inspect and change each shift.
Inspect and change each shift.
Wipe down inside and out, removing
residue.
Wipe down inside and out, removing
residue.
Clean, removing residue.
Wipe down inside.
Clean:
(1) Pull vacuum line off stainless steel tube
and make sure tube is clear.
(2) Lift chuck out of end effector.
(3) Gently scrape off slurry residue.
(4) Wipe clean.
(5) Replace in end effector.
(6) Replace vacuum line.
Check for proper readings for compressed
air, chuck vacuum,
DI water flow, spindle blow off, and slurry
diaphragm pumps.