Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 57
SLURRY SYSTEM FLUSH
The Slurry System Flush flushes the slurry lines with D.I. (deionized) water.
The Slurry Flush cycle should be operated regularly to keep the lines
flowing freely. The frequency of flushing depends on the length of idle
machine periods. After idle periods of four hours or more, the slurry lines
should be flushed before polishing. The slurry lines should also be flushed
before any anticipated long periods of idleness.
Assumption - The procedures below were written with the assumption that
the operator has powered up the machine and performed the home sequence
routine.
Select the Slurry Flush Menu:
Operator Action Explanation/Screen Display
1. <F9> Press the F9 key to choose
“Select Menu”.
2. <F2> Display the Slurry Flush Menu
by pressing the F2 key to select
“Slurry Flush”.
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