Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 65
WAFER BACKING INSERT CHANGE
Turn machine power ON and perform home sequence:
1. Following procedures detailed in the Basic Operation section
above, power up the machine and perform the home sequence
routine.
Remove carriers from spindles:
2. Following procedures detailed above in this chapter, remove
the carriers from spindles.
3. Place carriers on a work bench bottom side up.
Remove pads and clean each carrier:
4. Use a plastic scraper to raise one edge of pad.
5. Peel each pad off by rolling to the opposite edge.
6. Discard the used pads.
7. Clean each carrier and dry with a soft cloth:
a. Feel the carrier by hand for adhesive residue.
b. Remove remaining residue with mild solvent.
c. Dry with soft cloth.
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