Strasbaugh Operator Functions
Version 4.0 - February 1998 3 - 67
WAFER TEMPLATE RING CHANGE
Tools Required
• flatblade screwdriver
• torque screwdriver
Turn machine power ON and perform home sequence:
1. Following procedures detailed in the Basic Operation section
above, power up the machine and perform the home sequence
routine.
Remove carriers from spindles:
2. Following procedures detailed above in this chapter, remove
the carriers from spindles.
3. Place carriers on a work bench bottom side up.
Remove rings and clean each carrier:
4. Using a flatblade screwdriver, remove the eight 10-32 ring
clamp screws by rotating them counterclockwise.
5. Lift off the clamp ring.
6. Lift off and discard the used template ring.
7. Clean the clamp ring and carrier lip with mild solvent.
8. Dry with a soft cloth.
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