Strasbaugh 6DS-SP - Page 18

Operations Model 6DS-SP Planarizer
xvi Version 4.0 - February 1998
LIST OF FIGURES
Chapter 2 2-1
Figure 2-1 Model 6DS-SP Planarizer - Front View 7
Figure 2-2 Planarizer Left Side View 9
Figure 2-3 Planarizer Right Side View 10
Figure 2-4 Planarizer Rear View 11
Figure 2-5 Planarizer Subassemblies 13
Figure 2-6 Control Panel 16
Figure 2-7 Utility Connections - Standard Configuration 37
Chapter 3 3-1
Figure 3-1 Menu Grouping 9
Figure 3-2 User Interface - Parts of the Screen 12
Figure 3-3 Bezel Keyboard 16
Figure 3-4 Menu Selection 23
Figure 3-5 Home Machine Menu 26
Figure 3-6 Auto Polish Cycle Menu 28
Figure 3-7 Slurry Flush Menu 34
Figure 3-8 Recipe Management Menu 37
Figure 3-9 Home Machine Menu 42
Figure 3-10 Auto Polish Cycle Menu 45
Figure 3-11 Slurry Flush Menu 58
Chapter 4 4-1
Figure 4-1 Menu Grouping 4
Figure 4-2 Slurry Flush Menu 13
Figure 4-3 Recipe Management Menu 16
Figure 4-4 Polish Parameters Menu 19
Figure 4-5 Sweep Parameters Menu 26
Figure 4-6 Conditioning/Cleaning Parameters Menu
(Screen Page 1) 30
Figure 4-7 Conditioning/Cleaning Parameters Menu
(Screen Page 2) 34
Figure 4-8 Machine Parameters Menu (Screen Page 1) 39
Figure 4-9 Machine Parameters Menu (Screen Page 2) 42
Figure 4-10 Machine Parameters Menu (Screen Page 3) 45
Figure 4-11 Alarm Parameters Menu 50
Figure 4-12 Machine Setup Menu 54
Figure 4-13 Password Menu 57
Chapter 5 5-1
Figure 5-1 Alarm Log Menu 9