Operations Model 6DS-SP Planarizer
4 - 6 Version 4.0 - February 1998
SLURRY FLUSH MENU
This menu permits setting slurry flush parameters for cleaning the slurry
delivery systems. In addition, a slurry flush cycle may be started when this
menu is showing. If in the operator password level, all choices will be
unavailable, and the cursor will not show.
The Slurry Flush Menu must be showing to start a slurry flush cycle. Once
the cycle is started, other menus can be selected.
During the cycle, Time Remaining will show the time remaining until the
end of the slurry flush cycle.
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