Operations Model 6DS-SP Planarizer
4 - 14 Version 4.0 - February 1998
FUNCTION KEY CHOICES AVAILABLE AT THE AUTO POLISH
PARAMETERS MENU
Key Label Function(s)
Move
Up
"Move Up" moves the cursor up one item. If already at the
top, will "wrap" to the bottom.
Move
Down
"Move Down" moves the cursor down one item. If already at
the bottom, will "wrap" to the top.
Move
Left
"Move Left" causes the next step to the left to move to the
center column. If on step 1, will "wrap" to the highest step.
Move
Right
"Move Right" causes the next step to the right to move to the
center column. If already on the highest step, will "wrap" to
step 1.
All
Wafers
"All Wafers" sets the machine to polish wafers indefinitely.
ALL will show in the Wfrs display area.
No. of
Wafers
"Number of Wafers" permits entry of a finite number of
wafers to polish before automatically going to a "Finish
Cycle" state when polishing the last wafers. The Wfrs display
area will show the number of wafers remaining to be polished.
When the last wafer has been polished, the display will return
to the ALL setting.
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