Strasbaugh Machine Setup
Version 4.0 - February 1998 4 - 25
Menu Item Descriptions at the Conditioning/Cleaning Parameters Menu
(Screen Page 1)
Item Function(s)
Pad Conditioning Interval
Sets how many polish cycles occur before each
(ignored when in-situ conditioning) conditioning
event.
Conditioning Cycles
Sets how many complete conditioning cycles will
(ignored when in-situ conditioning)
Pre/Post Conditioning
(ignored when in-situ
conditioning)
Pre Cond
Post Cond
Conditioning cycles occur before polish cycles.
Conditioning cycles occur after polish cycles.
Conditioning Table Speed
Sets the table speed during conditioning.
Ranges:
0-250 rpm for standard
0-100 rpm for low speed machines
Conditioning Force Units
lbs
psi
Sets the units that conditioning force values
Device Diameter
The diameter used to calculate psi.
Cond Fluid Type
DI Water
Slurry l
Slurry 2
Pump 3
Slryl/Slry2
Slryl/Pmp3
Slry2/Pmp3
1, 2, & 3
DI water only (mechanical flow control)
Slurry 1 only (set flow rate)
Slurry 2 only (set flow rate)
Optional pump 3 only (set flow rate)
Both Slurry 1 and 2 (set flow rates)
Both Slurry 1 and Pump 3 (set flow rates)
Both Slurry 2 and Pump 3 (set flow rates)
Slurry l, Slurry 2, and Pump 3 (set flow rates)
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