Operations Model 6DS-SP Planarizer
4 - 26 Version 4.0 - February 1998
Item Function(s)
Slurry 1 Flow Rate
Sets the flow rate for the Slurry 1 pump.
(Ignored if fluid type not used for conditioning.)
Range: 0-1000 ml/m
Slurry 2 Flow Rate
Sets the flow rate for the Slurry 2 pump.
(Ignored if fluid type not used for conditioning.)
Range: 0-1000 ml/m
Pump 3 Flow Rate
Sets the flow rate for the optional Pump 3.
(Ignored if fluid type not used for conditioning.)
Range: 0-1000 ml/m
Conditioning Device Speed
Sets the rotation speed of the conditioning
device.
Range: 1-120 rpm
Conditioning Down Force
(Not shown. For non-programmable arm with
downforce option.)
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