Strasbaugh Machine Setup
Version 4.0 - February 1998 4 - 27
CONDITIONING/CLEANING
PARAMETERS MENU
(SCREEN PAGE 2)
This menu/page permits setting some of the parameters that determine the
pad conditioning cycle, the wafer cleaning cycle, and the carrier cleaning
cycle.
Two table machines do not have the carrier cleaning or wafer cleaning
choices.
Machines with the non-programmable arm do not have the Sweep Stroke
Start and In-situ Conditioning choices.
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