Operations Model 6DS-SP Planarizer
1 - 4 Version 4.0 - February 1998; Update 10/19/01
INTRODUCTION
WHAT’S NEW....
Version 4.0 of the 6DS-SP Operations and Maintenance manuals presents
the latest version of the 6DS-SP control software; maintenance support for
engineering advances implemented for the wafer-handling robot, cassette
elevators, and cleaning stations; and integration of manual updates and
changes to previous manual version.
FLAT PANEL DISPLAY OPERATOR INTERFACE
6DS-SP planarizers serial number 181 and later (12/13/96) are equipped
with an operator interface unit consisting of a flat panel display, vertically
mounted keypad, horizontally mounted standard keyboard, and control
panel. The unit, supported by a movable arm, may be located at either the
front, right, or left side of the machine cabinet. Options available include
dual front and side interfaces and a mobile remote interface installed in a
cabinet. For further details, refer to the Machine Description chapter of the
6DS-SP Operations manual or the Physical Description chapter of the 6DS-
SP Maintenance manual.
VERSION 4.25 OF THE 6DS-SP SOFTWARE
Where to Find More Information on the Software...
For a detailed introduction to the 4.25 software, refer to the Operator
Functions chapter of the 6DS-SP Operations manual.
NOTE
For post-4.25 software versions, feature descriptions and information
contained in the 6DS-SP User Interface Reference documentation take
precedence over information in this manual.
To find information on a specific menu, see the Menu Information Locator
table in the Contents section at the front
of each manual volume.
To Next Page
Loading...
