Operations Model 6DS-SP Planarizer
4 - 32 Version 4.0 - February 1998
MACHINE PARAMETERS MENU
(SCREEN PAGE 1 )
This menu/page permits setting the most commonly changed parameters for
machine operation. (The other two screen pages for this menu contain
parameters that are seldom changed.) These parameters can affect process
and are therefore saved as part of the recipe. (Other machine settings can be
found in the Machine Parameters and Calibration/Configuration menus.)
The Spindle Force Mode can be set for either constant pressure or constant
temperature. In the constant pressure mode, the polish force will be whatever
is entered in the Polish Parameters Menu. In the constant temperature mode,
force will be varied to attempt to maintain the pad temperature to the value
entered in Pad Temperature. If the constant pressure mode is used, the
Pad Temperature value is ignored.
The Left Force Scaling and Right Force Scaling values will cause the
actual polish force to differ from the polish parameter force by the percent
entered. This is intended to compensate for left/right polish differences that
are process related. They should not be used to compensate for differences
that are due to miscalibration of the machine.
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