Strasbaugh Machine Setup
Version 4.0 - February 1998 4 - 31
POLISH AND CONDITION FORCE UNITS AND DIAMETER
ENTRY:
Polish and conditioning force units and wafer diameter and conditioning
device diameter are entered in the Machine Parameters Menu and
Conditioning/Cleaning Parameters Menu respectively.
This permits the units and diameters to be saved as part of the recipe.
The diameter is not used if "lbs" is used for force. If "psi" is used and zero is
entered for the diameter, displays will show "Wfr Dia?" or "Dev Dia?" to
warn that no diameter is entered.
Also, if changing between "lbs" and "psi", no recipe values will be changed.
For example, 7 psi would become 7 lbs if the units were changed.
"SINGLE" SWEEP STYLE CHOICE:
The choice Single is among the One way and Two way sweep style choices
in the Conditioning/Cleaning Menu. If Single is selected, the value in the
Conditioning Cycles choice will specify a number of single sweep
traverses. For example, if Conditioning Cycles is set to "3" and Sweep
Start is set to Outer, the arm swill sweep three times (out to in, in to out,
and out to in).
PRE OR POST PAD CONDITIONING:
Pre or post conditioning can be set with the Pre/Post Conditioning choice.
If set to Pre Cond, conditioning cycles will occur before polishing cycles. If
set to Post Cond, conditioning cycles will occur after polishing cycles.
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