Strasbaugh Machine Setup
Version 4.0 - February 1998 4 - 37
Menu Item Descriptions at the Machine Parameters Menu (Screen Page 2)
Item Function(s)
Carrier Pad Rinse Time
Sets the carrier pad rinse and carrier top/side rinse
time after wafers are unloaded from spindles.
Load Rinse Time
Sets the load rinse time after wafers are unloaded
from spindles.
Fountain Rinse Time
Sets the fountain rinse after wafers are unloaded
from spindles.
Left Load Rinse Type
DI Water
Chemical
Selects desired fluid for the left load rinse.
Right Load Rinse Type
DI Water
Chemical
Selects desired fluid for the right load rinse.
Left Clean Rinse Type
DI Water
Chemical
Selects desired fluid for the left clean rinse. (Single
table machines only)
Right Clean Rinse Type
DI Water
Chemical
Selects desired fluid for the right clean rinse.
(Single table machines only)
Curtain Rinse Type
DI Water
Chemical
Selects desired fluid for the optional curtain rinse
Wet Idle at Auto End
Enbl/Dsbl
Enables automatic wet idle when the machine
finishes an auto cycle and returns to idle.
Wet Idle Table Speed
Sets the wet idling table(s) speed.
Wet Idle Table On
Sets the time the table(s) will be rotated and rinsed
during wet idle.
Wet Idle Table Off
Sets the time the table(s) will be stopped with
rinses turned off during wet idle.
Wet Idle Carriers On
Sets the time the carriers will be rotated and rinsed
during wet idle.
Wet Idle Carriers Off
Sets the time the carriers will be stopped with
rinses turned off during wet idle.
Wet Idle Slurry Flush
Enbl/Dsbl
If enabled, one slurry flush cycle will occur when
wet idling begins. The wet idle slurry flush will
use the choices from the Slurry Flush Menu.
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