Operations Model 6DS-SP Planarizer
4 - 38 Version 4.0 - February 1998
MACHINE PARAMETERS MENU
(SCREEN PAGE 3)
This menu/page permits setting some of the seldom changed parameters for
machine operation. These parameters can affect process and are therefore
saved as part of the recipe. (Other machine settings can be found in the
Machine Parameters and Calibration/Configuration menus.)
If the machine does not have fountain rinses, the Fountain Rinsing choice
should be set to Disable.
If the machine does not have a curtain rinse, the Curtain Rinse choice
should be set to Disable.
The Odd Wafer Polish choice sets the machine to polish a single wafer
even though it is set for both spindles if it can't find two wafers. The Odd
Wafer Time Adjust value will change all polish times by the percentage
entered during odd wafer polishing.
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