Operations Model 6DS-SP Planarizer
5 - 4 Version 4.0 - February 1998
“SLURRY 1 SUPPLY LOW OR ABSENT” - # 105 49
“SLURRY 2 SUPPLY LOW OR ABSENT” - # 106 49
“WFR NOT ON SPINDLE, abort or START clears” - #107 50
“LEAK DETECTION FAULT” - # 108 51
“WFR FOUND ON SPINDLE, abort clears” - # 109 52
“BRIDGE LUBE OIL LOW” - # 110 53
“LOW COOLING WATER FLOW RATE” - # 111 53
“AIR, WATER, OR VACUUM ABSENT” - # 112 54
“NO ACTIVE RECEIVE CASSETTE” - # 121 54
“WFR FOUND ON LOAD STATION” - # 122 55
“CARRIER(S) NOT INDEXING” - # 142 55
“WAFER NOT FOUND AT RIGHT LOAD” - # 143 56
“WAFER NOT FOUND AT LEFT LOAD” - # 144 56
“BRIDGE NOT ARRIVING AT TABLE 2” - # 148 56
“WAFER NOT FOUND ON ROBOT” - # 149 57
“SHUTTLE NOT ARRIVING FRONT” - # 150 57
“SHUTTLE NOT ARRIVING REAR” - # 151 57
“TBL 2 NOT LOCKING (left lock)” - # 152 58
“TBL 2 NOT LOCKING (right lock)” - # 153 58
“TBL 2 NOT UNLOCKING (left lock)” - # 154 58
“TBL 2 NOT UNLOCKING (Right lock)” - # 155 58
“LEFT SPINDLE VACUUM NOT FOUND” - # 156 59
“RIGHT SPINDLE VACUUM NOT FOUND” - # 157 59
“CONDITION ARM NOT ARRIVING UP” - # 158 60
“CONDITION ARM NOT ARRIVING DOWN” - # 159 60
“LEFT SPINDLE NOT ARRIVING UP” - # 160 61
“LEFT SPINDLE NOT ARRIVING UP” - # 161 61
“RIGHT SPINDLE NOT ARRIVING UP” - # 162 61
“RIGHT SPINDLE NOT ARRIVING UP” - # 163 61
“LT SEND ELEV NOT ARRIVING AT SLOT - # 164 62
“RT SEND ELEV NOT ARRIVING AT SLOT - # 165 62
“LT RECV ELEV NOT ARRIVING AT SLOT - # 166 62
“RT RECV ELEV NOT ARRIVING AT SLOT - # 167 62
“BRIDGE NOT ARRIVING AT LOAD - # 168 62
“BRIDGE NOT ARRIVING AT MIDDLE - # 169 62
“BRIDGE NOT ARRIVING AT TABLE 1 - # 170 62
“ROBOT NOT ARRIVING AT LEFT SEND” - # 171 63
“ROBOT NOT ARRIVING AT RIGHT SEND” - # 172 63
“ROBOT NOT ARRIVING AT LEFT RECV” - # 173 63
“ROBOT NOT ARRIVING AT RIGHT RECV” - # 174 63
“ROBOT NOT ARRIVING AT LEFT LOAD” - # 175 63
“ROBOT NOT ARRIVING AT LEFT LOAD” - # 176 63
“ROBOT ARM NOT ARRIVING AT ZERO” - # 177 64
“ROBOT ARM NOT ARRIVING AT LEFT SEND” - # 178 64
“ROBOT ARM NOT ARRIVING AT RIGHT SEND” - # 179 64
“ROBOT ARM NOT ARRIVING AT LEFT RECV” - # 180 64
“ROBOT ARM NOT ARRIVING AT RIGHT RECV” - # 181 64
“ROBOT ARM NOT ARRIVING AT LEFT LOAD” - # 182 64
“ROBOT ARM NOT ARRIVING AT RIGHT LOAD” - # 183 64
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