Strasbaugh 6DS-SP - Page 284

Operations Model 6DS-SP Planarizer
5 - 26 Version 4.0 - February 1998
ROBOT DROPS WAFERS--PART A
Problem
Indicator
Problem
Location
Component/
Cause
Resolution/
Responsibility
ROBOT
DROPS
WAFERS
Any location at
which robot is to
be holding a
wafer.
(1) Facility vacuum
off.
(2) Clean the robot
end effector
vacuum chuck.
(3) Incorrect
elevator height
alignment and
calibration.
(4) Incorrect robot
Z alignment at the
load stations.
(1a) Press the
EMERG OFF button.
(1b) Check facility
vacuum supply.
(2a) Refer to the
procedure found in
the Operator
Maintenance
Schedule, located in
the Operator
Functions chapter of
the 6DS-SP
Operations manual
and the Preventive
Maintenance
Schedules chapter of
the 6DS-SP
Maintenance manual.
OPERATIONS
(3a) Realign and
recalibrate per 6DS-
SP Maintenance
manual.
(4a) Recalibrate by
performing “Robot Z-
Axis Load Station
Position” calibrations,
found in the
Software Calibration
chapter of the 6DS-SP
Maintenance manual.
MAINTENANCE