Strasbaugh Troubleshooting
Version 4.0 - February 1998 5 - 27
ROBOT DROPS WAFERS--PART B
Problem
Indicator
Problem
Location
Component/
Cause
Resolution/
Responsibility
ROBOT
DROPS
WAFERS
Any location at
which robot is to
be holding a
wafer.
(5) Load chuck
surface not
parallel to robot
arm.
(6) Vacuum
solenoid failure.
* (5a) Check whether
the surface of each
load chuck is parallel
to the robot arm. If
not correct.
** (6a) Test/adjust
vacuum solenoid by
operating in
diagnostics or manual
control mode.
See the Pneumatic
Adjustments chapter
and the information
on the Diagnostics
and Manual Control
menus found in the
Mechanical
Maintenance
Procedures chapter of
the 6DS-SP
Maintenance manual.
MAINTENANCE
* (5a) Notes on Adjusting Load Chuck Surface to Parallel with Robot
Arm:
• For machines equipped with load chuck jack screws, adjust the jack
screws to correct the load chuck position.
• For machines without load chuck jack screws, use stainless steel or
plastic shims to correct the load chuck position.
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