Operations Model 6DS-SP Planarizer
5 - 28 Version 4.0 - February 1998
** (6a) Notes on Testing and Adjusting Vacuum Solenoid:
1. At Page 1 of the Manual Control Menu, select End Effector
On/Off and choose On to turn vacuum ON to the robot
vacuum chuck.
2. Manually hold a test wafer under the robot vacuum chuck to
see if the chuck can take the wafer.
3. If the chuck takes the wafer, try to pull it off.
The wafer should be difficult to remove!
If the chuck does not take the wafer or if the wafer is easy to
remove, vacuum is inadequate.
4. If vacuum is inadequate:
a. Inspect and clean the robot end effector vacuum chuck.
b. Using a T connection, “tee” a vacuum gauge into the end
effector’s vacuum line.
c. Check for 15 to 20 inches Hg (15 minimum inches Hg).
d. If vacuum is not 15 to 20 inches Hg, check all hose
connections and the solenoid. Replace if needed.
e. Check that vacuum hole in the chuck is clear.
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