Strasbaugh 6DS-SP - Page 296

Operations Model 6DS-SP Planarizer
5 - 38 Version 4.0 - February 1998
“SLURRY 1 PH LOW ALARM” - # 15
“SLURRY 1 PH HIGH ALARM” - # 16
“SLURRY 2 PH LOW ALARM” - # 19
“SLURRY 2 PH HIGH ALARM” - # 20
Problem
Indicator
Problem
Location
Component/ Cause Resolution/
Responsibility
ALARM
SOUNDS
DURING AUTO
POLISH
CYCLE
Control Panel.
The bottom of the
monitor screen
will display a
message showing
the cause
(1) Machine
parameter out of
range of a
programmed alarm
parameter.
(2) Screen message
shows slurry pH
alarm.
Note: The alarm is a
warning device--it does
not abort the cycle.
(1a) Read the bottom of
the screen for message.
(1b) Press the CYCLE
HALT button.
(2a) Check the status
area level displayed
against the alarm
parameters on Alarm
Parameters menu.
OPERATIONS
(2b) If the status area
level displayed is not
within the range of the
alarm parameters,
adjust the pH
transmitter (refer to the
Software Calibration
chapter of the 6DS-SP
Maintenance manual).
MAINTENANCE