Strasbaugh 6DS-SP - Page 315

Strasbaugh Troubleshooting
Version 4.0 - February 1998 5 - 57
“WAFER NOT FOUND ON ROBOT” - # 149
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Robot wafer
sensor not sensing a
wafer when the
vacuum is ON
(looking for a
wafer).
(1a) Verify wafer is
present.
OPERATIONS
(1b) Verify robot
vacuum is sufficient to
hold a wafer.
(1c) Adjust robot
vacuum sensor.
(1d) Clean wafer and
robot vacuum chuck
MAINTENANCE
“SHUTTLE NOT ARRIVING FRONT” - # 150
“SHUTTLE NOT ARRIVING REAR” - # 151
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Shuttle reed
switch not sensing
shuttle at the
commanded
position.
(2) Shuttle
mechanically stuck.
(3) Sensor
adjustment
problem.
(1a) Verify Machine
facility air pressure is
turned on.
OPERATIONS
(2a) Turn OFF facility
air and move by hand
to feel for binding.
(3a) Verify sensor
inputs 17 front and 18
rear. Adjust sensors if
needed.
MAINTENANCE