Strasbaugh 6DS-SP - Page 314

Operations Model 6DS-SP Planarizer
5 - 56 Version 4.0 - February 1998
“WAFER NOT FOUND AT RIGHT LOAD” - # 143
“WAFER NOT FOUND AT LEFT LOAD” - # 144
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Wafer not
present.
(2) Left or right
vacuum chuck not
sensing the wafer
during robot
transfer.
(1a) Verify wafer is
present.
(2a) Verify robot
up/down left load or
right load is calibrated
properly.
(2b) Verify load chuck
vacuum switch is
adjusted correctly.
MAINTENANCE
“BRIDGE NOT ARRIVING AT TABLE 2” - # 148
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Bridge servo not
arriving at the
commanded
position.
(2) Calibration
variable out of
range.
(1a) Servo tripped out--
Open and close polish
section operator doors
to reset.
(2a) Abort and rehome
axis.
OPERATIONS