Strasbaugh 6DS-SP - Page 313

Strasbaugh Troubleshooting
Version 4.0 - February 1998 5 - 55
“WFR FOUND ON LOAD STATION” - # 122
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Wafer on load
station.
(2) Load station
vacuum switch
indicating wafer
when none is
present.
(1a) Manually remove
wafer and restart
cycle.
OPERATIONS
(2a) Adjust the load
station vacuum switch.
MAINTENANCE
“CARRIER(S) NOT INDEXING” - # 142
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Indexing carrier
hardware installed
and enabled in
Calibration/
Configuration
Menu, but carriers
cannot home.
(1a) Verify machine is
equipped with the
carrier indexing
sensors and that the
carrier target has not
been removed.
(1b) Position the
carrier target under
the sensor and verify
that the red LED light
is on.
(1c) Verify sensor is
0.060” above the
carrier target.
MAINTENANCE