Strasbaugh 6DS-SP - Page 312

Operations Model 6DS-SP Planarizer
5 - 54 Version 4.0 - February 1998
“AIR, WATER, OR VACUUM ABSENT” - # 112
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Facility air,
water, or vacuum
not on or below
machine required
operating range.
(1a) Verify facilities are
on.
(1b) Verify facilities set
to correct pressures.
MAINTENANCE
“NO ACTIVE RECEIVE CASSETTE” - # 121
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Control
computer not
finding active
receive cassette.
(1a) Place a cassette on
a receive elevator.
OPERATIONS
(1b) Lower the cassette
sensor arm.
(1c) Test to see if the
cassette sensor is
tripped when the
cassette sensor arm is
lowered. If not, adjust
the switch.
MAINTENANCE