Strasbaugh 6DS-SP - Page 318

Operations Model 6DS-SP Planarizer
5 - 60 Version 4.0 - February 1998
“CONDITION ARM NOT ARRIVING UP” - # 158
“CONDITION ARM NOT ARRIVING DOWN” - # 159
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) Conditioning
arm not arriving at
the commanded
position.
(2) Conditioning
arm flow controls
and pressure
regulator not
adjusted correctly.
(3) Sensor
adjustment
problem.
(1a) Verify machine
facility air pressure is
turned on.
OPERATIONS
(2a) Adjust.
(3a) Verify sensor
input 25 is ON when
the arm is up, OFF
when it’s down. Adjust
sensor if needed.
MAINTENANCE