Strasbaugh 6DS-SP - Page 324

Operations Model 6DS-SP Planarizer
5 - 66 Version 4.0 - February 1998
“WAFER NOT SEATING AT LEFT LOAD” - # 197
“WAFER NOT SEATING AT RIGHT LOAD” - # 198
Problem
Indicator
Problem
Location
Component/ Cause
Resolution
ERROR
MESSAGE
Control
Computer
Screen
(1) The load chuck
is not sensing the
wafer properly
seated in the load
station.
(1a) Wafer absent or
poorly centered over
the load station--
calibrate the robot
position.
(1a) Adjust the load
chuck vacuum sensor.
MAINTENANCE