Maintenance Model 6DS-SP Planarizer
2 - 2 U Version 4.0 - February 1998; Update 11/06/01
Overview 3
Summary 3
Step 1 - Obtain The Facility And Equipment Preparation Sign-Off Sheet 4
Step 2 - Unpacking And Inspection 5
Preparation For Installation 5
Step 3 - Machine Placement 6
Step 4 - Leveling 7
Leveling Requirement 7
Leveling Feet 7
Seismic Protection 8
Step 5 - Confirming That Utility Sources Meet Requirements 9
General Facilities And Electrical Service Data Sheet 10
Step 6 - Connecting Utilities 12
Electrical 15
Compressed Air 16
Vacuum And D.I. Water 16
Vacuum System 16
Vacuum Separator 17
Exhaust 17
Exhaust Failure Indicator 17
Temperature-Controlled Water 18
Temperature Control Unit 18
Drains 19
Step 7 - Slurry System Connection 20
Step 8 - Completing The Installation - Initial Adjustments 22
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