Strasbaugh Installation
Version 4.0 - February 1998; Update 11/06/01 2 - 3 U
INSTALLATION
OVERVIEW
Before you begin installation of the 6DS-SP, obtain a copy of the Facility and
Equipment Preparation Sign-Off Sheet (found in the Strasbaugh, Installation
Report). The sign-off sheet provides a checklist of tasks (the tasks and the
checklist are detailed below in this chapter) required for the facility and
equipment preparation segment of the installation process.
As you complete each item by following the steps in this chapter, check it off,
and obtain customer approval.
SUMMARY
The list below is a summary of the procedures required to install the Model 6DS-
SP Planarizer. The sections following provide detailed information for each.
1. Obtain Facility and Equipment Preparation Sign-Off Sheet.
2. Unpacking/Inspection.
3. Machine Placement.
4. Leveling.
5. Confirming that Utility Sources Meet Requirements.
6. Connecting Utilities.
7. Connecting Slurry System.
8. Completing the Installation - Initial Adjustments.
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