Strasbaugh Installation
Version 4.0 - February 1998; Update 11/06/01 2 - 9 U
STEP 5 - CONFIRMING THAT UTILITY
SOURCES MEET
REQUIREMENTS
IMPORTANT: The necessary utilities must meet the required
specifications (shown below) in order for the Model
6DS-SP Planarizer to operate correctly.
The following list identifies the minimum facilities requirements for the
machine:
• Electrical: 208 VAC, THREE-PHASE
60 Hz, 60 FLA
36 Motor Load Amps
25,000 Interrupting Capacity Amps
(Refer to related electrical drawings
listed on page 2-13.)
• Clean Dry Air: 100 PSI, 10 SCFM
• Vacuum: 20 in. Hg
• D.I. Water: 30 PSI minimum
45 PSI maximum
(Note that Teflon D.I. water plumbing
is now standard on all machines.)
• Acid Drain: 1-1/2-in. pipe
• Industrial Waste Drain: 1-1/2-in. pipe
• Exhaust: 6-in. duct, 250 SCFM
• Bulk Slurry: 20 PSI maximum
• Nitrogen: 10 PSI
(NOVA option only) 3/8-in. polyflux (polyethylene) tubing
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