Maintenance Model 6DS-SP Planarizer
2 - 8 U Version 4.0 - February 1998; Update 11/06/01
SEISMIC PROTECTION
Once the machine has been properly leveled, the machine can be tied down
using the supplied anchor points on the machine for seismic protection. Each
machine is supplied with anchor points consisting of six (6) sets of two (2) 1/4-
20 threaded holes. Use SAE Grade 5 1/4-20 bolts in all twelve (12) holes to
properly secure the machine.
The machine user must supply the necessary hardware to attach the machine to
the user’s flooring and is responsible for how the machine is secured at the user’s
site. When selecting the method for attaching the machine to the flooring, the
fastening hardware must be able to withstand the following forces:
Table 2-1 Seismic Force Specifications
Force Specification
Lateral Force
7,990 pounds (3,620 kg) overall for whole
machine
Overturning Force
(vertical tensional force
on fastener)
158 pounds (71.7 kg) at each of the three sets
(two holes per set) anchor points on the front or
back of the machine
Refer to Engineering Drawing 6DSSP-217946-U7 for the dimensions of the
anchor points.
Note: The tie-down locations comply with the recommendations listed in
SEMI S2-0200
E
Section 19.
To Next Page
Loading...
